TITLE

Fluid and kinetic models of the low temperature H2 plasma produced by a radio-frequency reactor

AUTHOR(S)
Diomede, P.; Michau, A.; Redolfi, M.; Morscheidt, W.; Hassouni, K.; Longo, S.; Capitelli, M.
PUB. DATE
October 2008
SOURCE
Physics of Plasmas;Oct2008, Vol. 15 Issue 10, p103505
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A comparative study of two models, a kinetic and a fluid one, for the numerical simulation of H2 plasmas in parallel plate capacitively coupled rf discharges in one space dimension is presented. Both models adopt a multicomponent plasma description including several ionic species, take into account the self-consistent electric field by solving the Poisson equation and include a self-consistent coupling with the vibrational kinetics of the electronic ground state of H2 molecules. The peculiarities of this particular test case for model comparison with respect to previous studies are highlighted. The merits and the limitations of both approaches are discussed and the results are compared, in particular the steady-state density of charged species, the space-time variation of the electron energy, the vibrational distribution, and the atomic density.
ACCESSION #
35103305

 

Related Articles

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics