TITLE

Predicted thermally induced stresses in, and the bow of, a circular substrate/thin-film structure

AUTHOR(S)
Suhir[a], E.
PUB. DATE
September 2000
SOURCE
Journal of Applied Physics;9/1/2000, Vol. 88 Issue 5, p2363
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the development of a simple analytical stress model for the evaluation of the thermally induced stresses in, and the bow of, a circular substrate/thinfilm structure. Ability to predict and minimize the thermally induced stresses and deflections in such a structure; Consequence of the dissimilar materials in the structure.
ACCESSION #
3505836

 

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