Plasma fluorination of carbon-based materials for imprint and molding lithographic applications

Schvartzman, M.; Mathur, A.; Hone, J.; Jahnes, C.; Wind, S. J.
October 2008
Applied Physics Letters;10/13/2008, Vol. 93 Issue 15, p153105
Academic Journal
Diamondlike carbon nanoimprint templates are modified by exposure to a fluorocarbon-based plasma, yielding an ultrathin layer of a fluorocarbon material on the surface which has a very low surface energy with excellent antiwear properties. We demonstrate the use of these plasma fluorinated templates to pattern features with dimensions ∼20 nm and below. Furthermore, we show that this process is extendable to other carbon-based materials. Plasma fluorination can be applied directly to nanoimprint resists as well as to molds used to form elastomer stamps for microcontact printing and other applications requiring easy mold release.


Related Articles

  • Contrasts between molding TSEs and TPEs. Sommer, J.G. // Rubber World;Dec2002, Vol. 227 Issue 3, p33 

    Compares the performance between molding thermosetting elastomers and thermoplastic elastomers. Availability of the required processing technologies for thermoplastic elastomers; Characteristics of the plastics; Usability of the injection machines.

  • Mechanical properties and morphology of PBT/FE blends. Tomar, Neetu; Maiti, S. N. // Journal of Polymer Research;Feb2008, Vol. 15 Issue 1, p37 

    The mechanical properties such as tensile properties and Izod impact strength of melt compounded poly (butylene terephthlate)(PBT)/Fluorocarbon terpolymer elastomer (FE) blends at FE concentration from 0 to 0.26 volume fraction were studied. With increase in the FE concentrations the tensile...

  • Soft molding lithography of conjugated polymers. Pisignano, Dario; Persano, Luana; Cingolani, Roberto; Gigli, Giuseppe; Babudri, Francesco; Farinola, Gianluca M.; Naso, Francesco // Applied Physics Letters;2/23/2004, Vol. 84 Issue 8, p1365 

    We report on the nanopatterning of conjugated polymers by soft molding, and exploit the glass transition of the organic compound in conformal contact with an elastomeric element. We succeeded in printing different compounds with resolution down to 300 nm at temperatures up to 300 °C in...

  • Demolding temperature in thermal nanoimprint lithography. Sunggook Park; Zhichao Song; Brumfield, Lance; Amirsadeghi, Alborz; Jaejong Lee // Applied Physics A: Materials Science & Processing;Nov2009, Vol. 97 Issue 2, p395 

    In thermal nanoimprint lithography, temperature is one of the most important process parameters. Temperature is not only important for the flow of resist during molding but also for demolding, the process by which the imprint stamp is removed from the molded resist/substrate. This is because...

  • The Study of Deep Lithography and Moulding Process of LIGA Technique. Yuhua Guo; Gang Liu; Ya Kan; Yangchao Tian // AIP Conference Proceedings;2007, Vol. 879 Issue 1, p1494 

    The knowledge of the development behavior, especially the development rate, is of primary importance for the study of deep x-ray lithography in LIGA technique. In the first part of this paper, we have measured the development rates of crosslinked PMMA foils irradiated in NSRL covering a wide...

  • Flashless and wasteless transfer molding. Stritzke, Bernie // Rubber World;Jul2010, Vol. 242 Issue 4, p24 

    The article discusses the use of flashless transfer molding as an effective method for molding thermoset elastomer (TSE) that eradicates the need for secondary deflashing operations. It focuses on one of the more common pot and piston processes pertained to as a botomless pot. Premise of...

  • West to launch facility in China. McNulty, Mike // Rubber & Plastics News;6/27/2011, Vol. 40 Issue 24, p0001 

    The article reports that West Pharmaceutical Services Inc. will launch a compression molding plant in Shanghai, China, to manage growth and expansion in the Asia-Pacific region. It states that the new facility will primarily produce elastomeric stoppers, while its market in China is already as...

  • Casting machine success. Reed, David // Urethanes Technology;Oct/Nov2005, Vol. 22 Issue 5, p31 

    This article reports on the plan of Tecnoelastomeri to add casting machines to its product range in 2005. The firm is one of the newest polyurethane processing equipment makers in Italy. Originally established as a formulator of compounds and systems for making cast polyurethane elastomers, the...

  • Hawaiian bottle maker expands. DeRosa, Angie // Plastics News;9/19/2005, Vol. 17 Issue 29, p3 

    The article reports that Pacific Allied Products Ltd. (PAP) of Kapolei, Hawaii, is investing $5 million to add a 30,000-square-foot building solely dedicated to injection and blow molding. The investment will allow PAP to triple its annual production to more than 200 million bottles, officials...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics