Effect of microwave frequency on breakdown and electron energy distribution function using a global model

Sang Ki Nam; Verboncoeur, John P.
October 2008
Applied Physics Letters;10/13/2008, Vol. 93 Issue 15, p151504
Academic Journal
Global models (GMs) have proven a key modeling tool for the plasma processing field due to simplicity and speed. However, a GM requires specification of the electron energy distribution function (EEDF). The assumption of a Maxwellian EEDF leads to inaccurate reaction rate coefficients and results in error in plasma parameter prediction in high power microwave (HPM) driven discharges. Recently, a GM was developed with a pressure-independent enhanced EEDF to improve fidelity for modeling HPM breakdown. In this work, the GM is extended to 2 decades in frequency, and the frequency effect on HPM breakdown and the EEDF is investigated.


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