TITLE

Effect of metastable oxygen molecules in high density power-modulated oxygen dicharges

AUTHOR(S)
Panda, Siddhartha; Economou, Demetre J.
PUB. DATE
June 2000
SOURCE
Journal of Applied Physics;6/15/2000, Vol. 87 Issue 12, p8323
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study on the effect of metastable oxygen molecules in high density power-modulated oxygen discharges using a spatially averaged reactor model. Model details; Gas phase reactions; Comparison with experimental data; Parametric analysis; Effect of pulse period; Conclusions.
ACCESSION #
3490250

 

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