Influence of reaction with XeF2 on surface adhesion of Al and Al2O3 surfaces

Zhang, Tianfu; Park, Jeong Y.; Huang, Wenyu; Somorjai, Gabor A.
October 2008
Applied Physics Letters;10/6/2008, Vol. 93 Issue 14, p141905
Academic Journal
The change in surface adhesion after fluorination of Al and Al2O3 surfaces using XeF2 was investigated with atomic force microscopy. The chemical interaction between XeF2 and Al and Al2O3 surfaces was studied by in situ x-ray photoelectron spectroscopy. Fresh Al and Al2O3 surfaces were obtained by etching top silicon layers of Si/Al and Si/Al2O3 with XeF2. The surface adhesion and chemical composition were measured after the exposure to air or annealing (at 200 °C under vacuum). The correlation between the adhesion force increase and presence of AlF3 on the surface was revealed.


Related Articles

  • Use of Ionic Liquid in Fabrication, Characterization, and Processing of Anodic Porous Alumina. Salerno, Marco; Patra, Niranjan; Cingolani, Roberto // Nanoscale Research Letters;Aug2009, Vol. 4 Issue 8, p865 

    Two different ionic liquids have been tested in the electrochemical fabrication of anodic porous alumina in an aqueous solution of oxalic acid. It was found that during galvanostatic anodization of the aluminum at a current density of 200 mA/cm2, addition of 0.5% relative volume concentration of...

  • The insulator uncovered. Pethica, John B.; Egdell, Russ // Nature;11/1/2001, Vol. 414 Issue 6859, p27 

    Reports on the successful production of atomic-resolution images of the surface structure of alumina, an electric insulator, using atomic force microscopy (AFM) technique. Confirmation of the hexagonal patterns formed by surface atoms; Explanation of how AFM works in imaging surface structures...

  • Conducting tip atomic force microscopy analysis of aluminum oxide barrier defects decorated by electrodeposition. Carrey, J.; Bouzehouane, K.; George, J.-M.; Ceneray, C.; Fert, A.; Vaure`s, A.; Kenane, S.; Piraux, L. // Applied Physics Letters;11/5/2001, Vol. 79 Issue 19, p3158 

    We show that the electrodeposition of Ni[sub 80]Fe[sub 20] on top of a thin aluminum oxide barrier leads to particle growth occurring on preferential nucleation centers. The particle sites are attributed to local defects in the aluminum oxide barrier. As a function of the thickness of the...

  • Tunneling current and thickness inhomogeneities of ultrathin aluminum oxide films in magnetic tunneling junctions. Luo, E. Z.; Wong, S. K.; Pakhomov, A. B.; Xu, J. B.; Wilson, I. H.; Wong, C. Y. // Journal of Applied Physics;11/15/2001, Vol. 90 Issue 10, p5202 

    Tunneling current and thickness inhomogeneities of ultrathin aluminum oxide layers of magnetic tunnel junctions are studied by conducting atomic force microscopy (CAFM). The current inhomogeneities are attributed to thickness inhomogeneities on a nanometer scale. Thickness distributions are...

  • The wetting behavior of NiAl and NiPtAl on polycrystalline alumina. Gauffier, A.; Saiz, E.; Tomsia, A.; Hou, P. Y. // Journal of Materials Science;Dec2007, Vol. 42 Issue 23, p9524 

    In order to understand the beneficial effect of Pt on the adherence of thermally grown alumina scales, sessile drop experiments were performed to study the wetting of poly-crystalline alumina by nickel–aluminum alloys with or without platinum addition ranging from 2.4 to 10 at%....

  • Measuring the tensile and bending properties of nanohoneycomb structures. Jeon, J. H.; Choi, D. H.; Lee, P. S.; Lee, K. H.; Park, H. C.; Hwang, W. // Mechanics of Composite Materials;Mar2006, Vol. 42 Issue 2, p173 

    The mechanical properties, including Young’s modulus, the effective bending modulus, and the nominal fracture strength, of nanohoneycomb structures were measured by using an atomic force microscope (AFM) and a nano-universal testing machine (UTM). Anodic alumina films were taken as the...

  • Oxide thickness mapping of ultrathin Al[sub 2]O[sub 3] at nanometer scale with conducting atomic force microscopy. Olbrich, Alexander; Ebersberger, Bernd; Boit, Christian; Vancea, Johann; Hoffmann, Horst; Altmann, Hans; Gieres, Guenther; Wecker, Joachim // Applied Physics Letters;5/7/2001, Vol. 78 Issue 19, p2934 

    In this work, we introduce conducting atomic force microscopy (C-AFM) for the quantitative electrical characterization of ultrathin Al[sub 2]O[sub 3] films on a nanometer scale length. By applying a voltage between the AFM tip and the conductive Co substrate direct tunneling currents in the sub...

  • Magnetic nanowire arrays in anodic alumina membranes: Rutherford backscattering characterization. Hernández-Vélez, M.; Pirota, K. R.; Pászti, F.; Navas, D.; Climent, A.; Vázquez, M. // Applied Physics A: Materials Science & Processing;May2005, Vol. 80 Issue 8, p1701 

    Systematic study of magnetic nanowire arrays grown in anodic alumina membranes (AAM) has been done by means of Rutherford backscattering spectroscopy (RBS). The AAM used as templates were morphologically characterized by using high resolution scanning electron microscopy (HRSEM), fast Fourier...

  • Magnetic properties of densely packed arrays of Ni nanowires as a function of their diameter and lattice parameter. Vázquez, M.; Pirota, K.; Hernández-Vélez, M.; Prida, V. M.; Navas, D.; Sanz, R.; Batallán, F.; Velázquez, J. // Journal of Applied Physics;6/1/2004, Vol. 95 Issue 11, p6642 

    High-quality densely packed hexagonal arrays of Ni nanowires have been prepared by filling self-ordered nanopores in alumina membranes. Nanowires with different diameter d (18–83 nm) and lattice parameter D (65 and 105 nm) have been studied by atomic force, high resolution scanning...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics