TITLE

Localized heating and thermal characterization of high electrical resistivity silicon-on-insulator sensors using nematic liquid crystals

AUTHOR(S)
Elibol, Oguz H.; Reddy, Bobby; Bashir, Rashid
PUB. DATE
September 2008
SOURCE
Applied Physics Letters;9/29/2008, Vol. 93 Issue 13, p131908
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We present a method for localized heating of media at the surface of silicon-on-insulator field-effect sensors via application of an ac voltage across the channel and the substrate and compare this technique with standard Joule heating via the application of dc voltage across the source and drain. Using liquid crystals as the medium to enable direct temperature characterization, our results show that under comparable bias conditions, heating of the medium using an alternating field results in a greater increase in temperature with a higher spatial resolution. These features are very attractive as devices are scaled to the nanoscale dimensions.
ACCESSION #
34771935

 

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