Absolute atomic oxygen density profiles in the discharge core of a microscale atmospheric pressure plasma jet

Knake, Nikolas; Niemi, Kari; Reuter, Stephan; Schulz-von der Gathen, Volker; Winter, Jörg
September 2008
Applied Physics Letters;9/29/2008, Vol. 93 Issue 13, p131503
Academic Journal
The micro atmospheric pressure plasma jet is an rf driven (13.56 MHz, ∼20 W) capacitively coupled discharge producing a homogeneous plasma at ambient pressure when fed with a gas flow of helium (1.4 slm) containing small admixtures of oxygen (∼0.5%). The design provides excellent optical access to the plasma core. Ground state atomic oxygen densities up to 3×1016 cm-3 are measured spatially resolved in the discharge core by absolutely calibrated two-photon absorption laser-induced fluorescence spectroscopy. The atomic oxygen density builds up over the first 8 mm of the discharge channel before saturating at a maximum level. The absolute value increases linearly with applied power.


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