Crystallographically oriented Zn nanocrystals formed in ZnO by Mn+-implantation

Li, Y. J.; Zhang, B.; Lu, W.; Wang, Y.; Zou, J.
September 2008
Applied Physics Letters;9/29/2008, Vol. 93 Issue 13, p131919
Academic Journal
The nanostructural characteristics of ZnO implanted with Mn+ to doses ranging from 1×1015 to 1×1017 cm-2 are systematically studied for both as-implanted and postannealed cases. The detailed structural characterizations confirmed that the Mn+ implantation and postannealing result in (1) the formation of crystallographically orientated Zn nanocrystals in the ZnO matrix and (2) Mn atoms occupy the Zn sites in ZnO.


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