The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition

Qi Wang; Chengbing Wang; Zhou Wang; Junyan Zhang; Deyan He
September 2008
Applied Physics Letters;9/29/2008, Vol. 93 Issue 13, p131920
Academic Journal
Hydrogenated diamondlike carbon films were prepared at different reactive times by dc-pulse plasma chemical vapor deposition technique. The thickness of the film increased significantly with the reactive time, and the stress is just 0.9 GPa when the thickness of the film increased to 2 μm. The structure analysis by high resolution transmission electron microscopy, Raman spectroscopy, x-ray photoelectron spectroscopy, and Fourier transform infrared spectra revealed a close relationship between the residual compressive stress and the microstructure of the films, which nanometer scale curved graphite sheets with pentatomic and heptatomic rings bestowed the film lower stress.


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