TITLE

Strategies for energy reduction in semiconductor manufacturing

AUTHOR(S)
Huang, T.
PUB. DATE
October 2008
SOURCE
Solid State Technology;Oct2008, Vol. 51 Issue 10, p30
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article highlights the International SEMATECH Manufacturing Initiative's (ISMI) energy reduction strategy program which addresses both facilities and processing equipment in the U.S. It offers information on the programs launched by the ISMI on its strategy in reduction energy costs which includes studies of optimal clear room air management and modification methods. On its effort of energy reduction, the research claims that it has yielded results both the facility and process equipment.
ACCESSION #
34706883

 

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