TITLE

Calibration of shielded microwave probes using bulk dielectrics

AUTHOR(S)
Lai, K.; Kundhikanjana, W.; Kelly, M. A.; Shen, Z. X.
PUB. DATE
September 2008
SOURCE
Applied Physics Letters;9/22/2008, Vol. 93 Issue 12, p123105
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from the cantilever body and localizes the interaction only around the focused-ion beam deposited Pt tip. The approaching curve of an oscillating tip toward bulk dielectrics can be quantitatively simulated and fitted to the finite-element analysis result. The peak signal of the approaching curve is a measure of the sample dielectric constant and can be used to study unknown bulk materials.
ACCESSION #
34647421

 

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