Hydrothermally fabricated epitaxial PbTiO3 patterns patterned lithographically by etching in hydrothermal KOH solution

Ahn, S. H.; Choi, S. K.
September 2008
Applied Physics Letters;9/15/2008, Vol. 93 Issue 11, p113102
Academic Journal
We investigated the chemical etching behavior of heteroepitaxial PbTiO3 films on Nb-doped SrTiO3 substrate with mono-+c-domain fabricated by using hydrothermal epitaxy. The as-fabricated films were patterned lithographically into submicron-sized patterns with various lateral sizes using KOH solution and the etching mechanism is suggested. Our study reveals the feasibility of fabricating patterned nanodomains in PbTiO3 films by scanning probe microscopy domain engineering and a chemical etching process. Further, our study shows that an analysis of the distribution and morphology of polarized ferroelectric nanodomains in PbTiO3 is possible through a precise control over the applied bias voltage, pulse width, and time.


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