Si nanophotonics based cantilever sensor

Chengkuo Lee; Jayaraj Thillaigovindan; Chii-Chang Chen; Xian Tong Chen; Ya-Ting Chao; Shaohua Tao; Wenfeng Xiang; Aibin Yu; Hanhua Feng; Lo, G. Q.
September 2008
Applied Physics Letters;9/15/2008, Vol. 93 Issue 11, p113113
Academic Journal
We present design and simulation results of a novel nanomechanical sensor using silicon cantilever embedded with a two-dimensional photonic crystal microcavity resonator. Both of resonant wavelength and resonant wavelength shift could be measured as a function of various physical parameters such as applied force, strain, and displacement. Rather linear relationship is derived for strain and resonant wavelength shift. This new nanomechanical sensor shows promising features for biomolecules detection.


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