X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high-k dielectric prepared by sol-gel spin coating method

Kuo-Hsing Kao; Shiow-Huey Chuang; Woei-Cherng Wu; Tien-Sheng Chao; Jian-Hao Chen; Ming-Wen Ma; Reui-Hong Gao; Chiang, Michael Y.
September 2008
Applied Physics Letters;9/1/2008, Vol. 93 Issue 9, p092907
Academic Journal
The characteristics of CoTiO3 high-k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.


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