Epitaxial nanotwinned Cu films with high strength and high conductivity

Anderoglu, O.; Misra, A.; Wang, H.; Ronning, F.; Hundley, M. F.; Zhang, X.
August 2008
Applied Physics Letters;8/25/2008, Vol. 93 Issue 8, p083108
Academic Journal
We report on the synthesis of epitaxial (single-crystal-like), nanotwinned Cu films via magnetron sputtering. Increasing the deposition rate from 1 to 4 nm/s decreased the average twin lamellae spacing from 16 to 7 nm. These epitaxial nanotwinned Cu films exhibit significantly higher ratio of hardness to room temperature electrical resistivity than columnar grain (nanocrystalline), textured, nanotwinned Cu films.


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