TITLE

Experimental studies of transverse metastable ion velocity distribution functions in the presheath of a weakly collisional argon plasma

AUTHOR(S)
Dongsoo Lee; Hershkowitz, Noah; Severn, Greg
PUB. DATE
August 2008
SOURCE
Physics of Plasmas;Aug2008, Vol. 15 Issue 8, p083503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Laser-induced fluorescence measurements of the transverse metastable ion velocity distribution function near a negatively biased plate in a low temperature (Te<1 eV), low pressure (p0<1 mTorr) dc multi-dipole argon discharge plasma have been made with a diode laser. The metastable argon ions in the 3s23p4(3P)3d4F7/2 state are found to be characterized by a Maxwellian temperature transverse to the direction normal to the plate. For a neutral pressure of 0.3 mTorr, the transverse temperature increases along the presheath from 0.026 eV in the bulk plasma to 0.058 eV at the presheath sheath boundary.
ACCESSION #
34169234

 

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