TITLE

Measuring line edge roughness: Fluctuations in uncertainty

PUB. DATE
August 2008
SOURCE
Microlithography World;Aug2008, Vol. 17 Issue 3, p10
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article provides information on measuring line edge roughness (LER), the edge deviations of a feature that occur on a dimensional scale of the imaging tool that was used to print the feature of a lithography. It cites that 50 measurements of edge positions must be made to measure the LER to 10% precision. The sources of bias in LER measurement are discussed including the tendency to always make the measured LER less than the actual LER. Also noted are the common systematic errors of measuring LER.
ACCESSION #
33832409

 

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