Accelerating both sparse and dense OPC computation

Albertalli, Charlie; Word, James
August 2008
Microlithography World;Aug2008, Vol. 17 Issue 3, p2
Trade Publication
The article discusses the benefits of employing optical proximity correction (OPC) processing based on layer density and high-performance computing platforms to control mask cost and turnaround time. Among the factors considered by OPC techniques in assessing the pattern are pellicle and optics. One essential element to performing OPC and computational lithography (CL) techniques is said to be simulating the intensity of the light at the wafer plane. Also examined are basic approaches to the Hybrid High Performance Compute Farm (HCF) architecture.


Related Articles

  • Automating the CD-SEM recipe process for 45nm technologies. Chan, Kevin; Jackson, Tom; Futatsuya, Hiroki; Yamamoto, Hajime; Osawa, Morimi; Peltinov, Ram // Microlithography World;Aug2008, Vol. 17 Issue 3, p14 

    The article discusses the automation of the critical dimension-scanning electron microscopy (CD-SEM) recipe process for 45 nanometer (nm) technologies based on an experiment conducted by Fujitsu. It defines a recipe as a predefined set of tool instructions on specific target areas for reviewing...

  • The new horizon of optical computing. Ames, Ben // Military & Aerospace Electronics;Jul2003, Vol. 14 Issue 7, p20 

    Focuses on the improvements in optical computing. Introduction of parallel optics technology VCSEL; Applications using optics; Advantages of optical computing.

  • Optical computers come into focus. O'Malley, Chris // Popular Science;May93, Vol. 242 Issue 5, p43 

    States that researchers at the University of Colorado at Boulder have built what they claim is the world's first general-purpose computer that uses light beams rather than electrical pulses. Capabilities; Speed--the promise of optical computers.

  • WDM bandwidth: How high is up?  // Telecommunications - Americas Edition;Jan98, Vol. 32 Issue 1, p14 

    Focuses on the interest in wave division multiplexing, due to the emergence of 16- and 32-channel systems. Introduction of higher bandwidth capacity systems.

  • Light-speed computation. Dane, Abe; Pope, Greg // Popular Mechanics;Jun93, Vol. 170 Issue 6, p20 

    Discusses the world's first general-purpose optical computer that uses light beams, not electricity, to flash through calculations. Details on the Bit-Serial Optical Computer, the only machine to both crunch numbers and store its instructions with pulses of light; Size and other capabilities.

  • Phase coupling of two optically pumped vertical-cavity surface-emitting lasers. Hendriks, R. F. M.; van Exter, M. P.; Woerdman, J. P.; van der Poel, C. J. // Applied Physics Letters;8/12/1996, Vol. 69 Issue 7, p869 

    We have studied the interaction between two optically pumped vertical-cavity surface-emitting lasers (VCSELs) on a wafer as a function of their separation d. The VCSELs are strongly coupled for d≤13 μm, leading to the appearance of higher-order lateral modes. For d>=13 μm the VCSELs...

  • Plasma etch rates: The impact of mask transmittance. Pindo, Massimiliano // Solid State Technology;Aug2001, Vol. 44 Issue 8, p55 

    Discusses the impact of mask characteristics on plasma-etching performance when endpoint detection is used. Application of plasma systems with endpoint detection to polysilicon and metal etching; Discussion on mask transmittance and macroloading; Repetition of exposure fields on a semiconductor...

  • Compound materials for reversible, phase-change optical data storage. Chen, M.; Rubin, K. A.; Barton, R. W. // Applied Physics Letters;9/1/1986, Vol. 49 Issue 9, p502 

    Results of rapid (laser induced) and slow (heating stage induced) crystallization studies on Te1-xGex, 0≤x≤0.6, are reported. The time it takes to laser crystallize varies with x by more than four orders of magnitude. Films with stoichiometric compositions, Te and GeTe, can be...

  • Optics explode. Masud, Sam // Telecommunications - Americas Edition;Dec99, Vol. 33 Issue 12, p22 

    Focuses on service providers' adoption of optical technology caused by the increasing demand for bandwidth. Companies that are using passive optical networking (PON) technology; Distinguishing feature of PON; Bandwidth solutions offered by various firms; Companies that are seeing opportunities...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics