Direct measurement of beam size in a spectroscopic ellipsometry setup

Tay, Arthur; Ng, Tuck Wah; Wang, Yuheng; Zhao, Shao
June 2008
Review of Scientific Instruments;Jun2008, Vol. 79 Issue 6, p063101
Academic Journal
Spectroscopic ellipsometry signals used in thin film analysis are dependent on the beam probe size. In this work, we report a technique to determine the beam size that uses the existing detection facilities in a spectroscopic ellipsometry setup without the need to rearrange the optical components. The intensity signal recorded with the technique comprises a coupled boundary diffraction and knife edge wave that can be isolated using nonlinear fitting. This then permitted an accurate measurement of the beam size with the stronger knife edge component. The technique has the added advantage of picking up chromatic aberration in the probing lens which may be a factor in ellipsometry measurement.


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