Innovative refractive optics for exposure tool illumination

Bizjak, T.; Mitra, T.; Homburg, O.; Hauschild, D.; Aschke, L.
May 2008
Microlithography World;May2008, Vol. 17 Issue 2, p14
Trade Publication
The article presents information on arrays of refractive micro-optics. These arrays are the desired homogenizing elements in illumination systems for exposure and metrology tools since they are able to produce profiles with uniformity notably superior than 1% peak-to-valley at numerical apertures and deliver custom intensity distributions. It is the author's view that refractive micro-lens are vital components in the illumination part of high-performance exposure and inspection systems.


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