Effects of fast monoenergetic electrons on the ion dynamics near the cathode in a pulsed direct current plasma sheath

Sharifian, M.; Shokri, B.
March 2008
Physics of Plasmas;Mar2008, Vol. 15 Issue 3, p033503
Academic Journal
A detailed one-dimensional simulation of the ion dynamics of the plasma sheath near a substrate (cathode) in the presence of fast monoenergetic electrons has been carried out in this article. The sheath evolution is investigated by using a fluid model assuming that the ions, plasma electrons and monoenergetic, fast electrons act as three fluids (fluid approach). The effect of the density of fast electrons on the ion density, ion velocity, and ion energy near the cathode and the evolution of the sheath boundary in front of the cathode are separately explored. Also, the variation of the ion velocity and ion density at the vicinity of the cathode as a function of time is investigated in the absence and presence of the electron beam. Results indicate that the presence of fast electrons in the sheath causes significant change in the sheath thickness and therefore basically changes the ion velocity, ion density, and ion impact energy on the cathode compared to the absence of the electron beam case.


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