Dow Corning boosting production of silicon resin for bilayer photoresist

Mutschler, Ann Steffora
February 2008
Electronic News;2/25/2008, Vol. 54 Issue 8, p10
Trade Publication
The article reveals the plan of semiconductor manufacturing materials supplier Dow Corning Electronics to boost the production capacity of its silicon polymer resin in a bid to meet growing market demand. Dow Corning said its silicon resin, when combined with photosensitive materials, allows chip makers to use thinner photoresist layers, which in turn improves pattern resolution, allowing chip manufacturers to produce smaller circuit patterns. Silicon provides more etch resistance for thinner layers to be used, as well as achieve higher resolution.


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