TITLE

SVG Litho Tool Spans Generations

AUTHOR(S)
Chappell, Jeff
PUB. DATE
May 2000
SOURCE
Electronic News;05/08/2000, Vol. 46 Issue 19, p12
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the Micrascan lithography platform, a lithography technology developed by the Silicon Valley Group Incorporated. Use of the company's miniscanner; Goal of the company; Features of the lithography technology.
ACCESSION #
3090336

 

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