TITLE

Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations

AUTHOR(S)

Kokkonen, Kimmo; Kaivola, Matti

PUB. DATE

February 2008

SOURCE

Applied Physics Letters;2/11/2008, Vol. 92 Issue 6, p063502

SOURCE TYPE

Academic Journal

DOC. TYPE

Article

ABSTRACT

We describe a scanning heterodyne interferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6 GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ~1 pm with a lateral resolution of <1 �m. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.

ACCESSION #

30102110

Tags: LASER interferometers;  INTERFEROMETERS;  VIBRATION;  OSCILLATIONS;  ELECTRO-acoustics

 

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