Focus averaging

Mack, Chris
February 2008
Microlithography World;Feb2008, Vol. 17 Issue 1, p10
Trade Publication
The article presents an analysis of focus averaging or focus drilling. A variety of processes that result to this phenomenon is described. It also discusses the impact of focus averaging to image quality, whether beneficial or not, presenting different variables that can result whether it can worsen or improve the image. The article also suggests that focus averaging can be a viable depth of focus (DOF) enhancement approach.


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