TITLE

Focus averaging

AUTHOR(S)
Mack, Chris
PUB. DATE
February 2008
SOURCE
Microlithography World;Feb2008, Vol. 17 Issue 1, p10
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article presents an analysis of focus averaging or focus drilling. A variety of processes that result to this phenomenon is described. It also discusses the impact of focus averaging to image quality, whether beneficial or not, presenting different variables that can result whether it can worsen or improve the image. The article also suggests that focus averaging can be a viable depth of focus (DOF) enhancement approach.
ACCESSION #
30055108

 

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