Portable x-ray fluorescence spectrometer for coating thickness measurement

Carapelle, Alain; Fleury-Frenette, Karl; Collette, Jean-Paul; Garnir, Henri-Pierre; Harlet, Philippe
December 2007
Review of Scientific Instruments;Dec2007, Vol. 78 Issue 12, p123109
Academic Journal
A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1–1500 nm in an industrial environment. Accuracy of ∼3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.


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