TITLE

Portable x-ray fluorescence spectrometer for coating thickness measurement

AUTHOR(S)
Carapelle, Alain; Fleury-Frenette, Karl; Collette, Jean-Paul; Garnir, Henri-Pierre; Harlet, Philippe
PUB. DATE
December 2007
SOURCE
Review of Scientific Instruments;Dec2007, Vol. 78 Issue 12, p123109
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1–1500 nm in an industrial environment. Accuracy of ∼3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.
ACCESSION #
28723902

 

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