Influence of Oxygen Content on the Physical and Electrical Properties of Thin Yttrium Oxide Dielectrics Deposited by Reactive RF Sputtering on Si Substrates

Tung-Ming Pan; Jian-Der Lee
October 2007
Journal of Electronic Materials;Oct2007, Vol. 36 Issue 10, p1395
Academic Journal
This paper describes the physical properties and electrical characteristics of thin Y2O3 gate oxides grown on silicon substrates through reactive radiofrequency (RF) sputtering. The structural and morphological features of these films were studied using X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy. We found that the Y2O3 gate film prepared under an argon-to-oxygen flow ratio of 25:5 and annealed at 700°C exhibited a reduced equivalent oxide thickness, gate leakage current, interfacial density of states, and hysteresis voltage; it also showed an increased breakdown voltage. We attribute this behavior to (1) the optimum oxygen content in the metal oxide film preventing amorphous silica or silicate from forming at the Y2O3/Si interface and (2) the low surface roughness. These materials also exhibit negligible degrees of charge trapping at high electric field stress.


Related Articles

  • On PbTiO3-(111)-Pt interfacial layers and their x-ray photoelectron spectroscopy signature. Habouti, S.; Solterbeck, C-H.; Es-Souni, M.; Zaporojtchenko, V. // Journal of Applied Physics;Nov2008, Vol. 104 Issue 10, p104101 

    In this work emphasis is placed on the investigation of interfacial layers between sol-gel processed PbTiO3 (PTO) thin films and (111)Pt terminated silicon substrates. The methods used are x-ray diffraction, x-ray photoelectron spectroscopy (XPS) combined with depth profiling, and atomic force...

  • Study of ZnO and Ni-doped ZnO synthesized by atom beam sputtering technique. Ghosh, S.; Srivastava, P.; Pandey, B.; Saurav, M.; Bharadwaj, P.; Avasthi, D. K.; Kabiraj, D.; Shivaprasad, S. M. // Applied Physics A: Materials Science & Processing;Mar2008, Vol. 90 Issue 4, p765 

    Zinc oxide (ZnO) and Ni-doped zinc oxide (ZnO:Ni) films are prepared by atom beam sputtering with an intent of growing transparent conducting oxide (TCO) material and understanding its physical properties. The crystalline phases of the films are identified by the grazing angle X-ray diffraction...

  • Structural Characterization of La1--xSrxCoO3 Thin Films Deposited by Pulsed Electron Deposition Method. CIENIEK, Ł.; KOPIA, A.; CYZA, A.; KOWALSKI, K.; KUSIŃSKI, J. // Acta Physica Polonica, A.;2016, Vol. 130 Issue 4, p1121 

    The aim of the presented research was to investigate the influence of strontium dopant on the structure and composition of La1-xSrxCoO3 (x = 0, 0.1, 0.2) perovskite thin films. Pure and Sr doped LaCoO3 thin films were grown by pulsed electron deposition technique on crystalline epi-polished...

  • Characterization of X-ray irradiated graphene oxide coatings using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Blanton, Thomas N.; Majumdar, Debasis // Powder Diffraction;Jun2013, Vol. 28 Issue 2, p68 

    In an effort to study an alternative approach to make graphene from graphene oxide (GO), exposure of GO to high-energy X-ray radiation has been performed. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM) have been used to characterize GO before...

  • Revealing the mechanism of the early stages of Ni--W RABiTS oxidation. Blednov, Andrey V.; Gorbenko, Oleg Yu.; Rodionov, Dmitriy P.; Kaul, Andrey R. // Journal of Materials Research;Dec2010, Vol. 25 Issue 12, p2362 

    The early stages of surface oxidation of biaxially textured Ni--W tapes were studied using thermodynamic calculations along with experimental tape oxidation at low P(O2). Tape phase and chemical composition, surface morphology, and roughness were examined using x-ray diffraction (XRD),...

  • Influence of annealing on the structural and optical properties of ZnO:Tb thin films. Teng, X. M.; Fan, H. T.; Pan, S. S.; Ye, C.; Li, G. H. // Journal of Applied Physics;9/1/2006, Vol. 100 Issue 5, p053507 

    The influence of annealing on the morphological, structural, and optical properties of ZnO:Tb thin films on Si substrate grown by magnetron cosputtering is investigated. It has been found that the ZnO:Tb thin films with structures of tetrapod and screwlike nanorod are formed after annealing at...

  • Epitaxial graphene on single domain 3C-SiC(100) thin films grown on off-axis Si(100). Ouerghi, A.; Balan, A.; Castelli, C.; Picher, M.; Belkhou, R.; Eddrief, M.; Silly, M. G.; Marangolo, M.; Shukla, A.; Sirotti, F. // Applied Physics Letters;7/9/2012, Vol. 101 Issue 2, p021603 

    The current process of growing graphene by thermal decomposition of 3C-SiC(100) on silicon is technologically attractive. Here, we study epitaxial graphene on single domain 3C-SiC films on off-axis Si(100). The structural and electronic properties of such graphene layers are explored by atomic...

  • Effects of Vanadium Content on Structure and Chemical State of TiVN Films Prepared by Reactive DC Magnetron Co-Sputtering. Deeleard, Teerawit; Chaiyakun, Surasing; Pokaipisit, Artorn; Limsuwan, Pichet // Materials Sciences & Applications;Sep2013, Vol. 4 Issue 9, p556 

    TiVN films were deposited on Si(100) wafers without external heating and biasing by reactive dc magnetron co-sputtering. Titanium and vanadium metals were used as sputtering targets. Ar and N2 gases were used as sputtering gas and reactive gas, respectively. The flow rates of Ar and N2 were 8...

  • Structural Properties Studies of Zinc Oxide Thin Film Grown on Silicon Carbide by Means of X-ray Diffraction Technique. Ching, C. G.; Ng, S. S.; Hassan, Z.; Hassan, H. Abu; Al-Hardan, N. H.; Abdullah, M. J. // AIP Conference Proceedings;3/30/2011, Vol. 1328 Issue 1, p261 

    In this work, the structural properties of the zinc oxide (ZnO) thin film on silicon carbide (6H-SiC) grown by radio frequency sputtering technique are investigated thoroughly by means of X-ray diffraction (XRD) technique. Both conventional XRD phase analysis and rocking curve measurements are...


Read the Article


Sign out of this library

Other Topics