TITLE

Laser output power stabilization for direct laser writing system by using an acousto-optic modulator

AUTHOR(S)
Kim, Dong Ik; Rhee, Hyug-Gyo; Song, Jae-Bong; Lee, Yun-Woo
PUB. DATE
October 2007
SOURCE
Review of Scientific Instruments;Oct2007, Vol. 78 Issue 10, p103110
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We present experimental results on the output power stabilization of an Ar+ laser for a direct laser writing system (LWS). Instability of the laser output power in the LWS cause resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-optic modulator, a photodetector, and a servo controller. In this system, we have achieved the stability of ±0.20% for 12 min and the relative intensity noise level of 2.1×10-7 Hz-1/2 at 100 Hz. In addition, we applied our system to a 2 mW internal mirror He–Ne laser. As a consequence, we achieved the output power stability of ±0.12% for 25 min.
ACCESSION #
27420443

 

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