TITLE

Semi-quantitative chemical analysis of hard coatings by Raman micro-spectroscopy: the aluminium chromium nitride system as an example

AUTHOR(S)
Kaindl, R.; Sartory, B.; Neidhardt, J.; Franz, R.; Reiter, A.; Polcik, P.; Tessadri, R.; Mitterer, C.
PUB. DATE
November 2007
SOURCE
Analytical & Bioanalytical Chemistry;Nov2007, Vol. 389 Issue 5, p1569
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A new method for chemical analyses of nitride-based hard coatings is presented. Raman band shifts in the spectra of Al x Cr1− x N coatings, deposited by physical vapour deposition from Al x Cr1− x targets with x T,Al = 0, 0.25, 0.50, 0.70 and 0.85, are calibrated using compositional data of the coatings derived by elastic recoil detection analysis (ERDA) and electron probe micro-analysis (EPMA). Inserting the composition-dependent Raman shift of a combinatorial acoustic-optic lattice mode into an empirically derived equation allows the determination of Al/Cr ratios of the coating with an accuracy of about ±2%. Spot, line and area analyses of coated cemented carbide and cold work steel samples by using a computer-controlled, motorized x, y-stage are demonstrated and the most important errors influencing precision and accuracy are discussed. [Figure not available: see fulltext.]
ACCESSION #
27251464

 

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