TITLE

Survey: No EUV until 2015 or later

AUTHOR(S)
Mutschler, Ann Steffora
PUB. DATE
September 2007
SOURCE
Electronic News;9/10/2007, Vol. 53 Issue 37, p27
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article reports that extreme ultraviolet (EUV) lithography will not make it to production until 2015 or later, according to a semiconductor manufacturing survey conducted by WeSRCH, the social networking site of market research firm VLSI Research Inc. Seventy four percent of the respondents said that EUV will reach production between 2015 and 2024.
ACCESSION #
26629087

 

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