TITLE

Small plasma source for materials application

AUTHOR(S)
Vizir, A.; Oks, E. M.; Salvadori, M. C.; Teixeira, F. S.; Brown, I. G.
PUB. DATE
August 2007
SOURCE
Review of Scientific Instruments;Aug2007, Vol. 78 Issue 8, p086103
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We describe a small hollow-cathode plasma source suitable for small-scale materials synthesis and modification application. The supporting electrical system is minimal. The gaseous plasma source delivers a plasma ion current of up to about 1 mA. Here we outline the source construction and operation, and present some of its basic performance characteristics.
ACCESSION #
26520541

 

Related Articles

  • Cylindrical Penning trap for the study of electron plasmas. Amoretti, M.; Bettega, G.; Cavaliere, F.; Cavenago, M.; De Luca, F.; Pozzoli, R.; Romé, M. // Review of Scientific Instruments;Sep2003, Vol. 74 Issue 9, p3991 

    The ELTRAP device installed at the Department of Physics of the University of Milan is a Malmberg–Penning trap, with a magnetic field up to 0.2 T, equipped with charge coupled device optical diagnostics. It is intended to be a small scale facility for electron plasma and beam dynamics...

  • Pulsed hot cathode (LaB6) discharge for uniform plasma production. Savas, S. E.; Pyle, R. V.; Berkner, K. H. // Review of Scientific Instruments;Nov86, Vol. 57 Issue 11, p2699 

    A pulsed hot cathode hydrogen discharge of several milliseconds duration is used to produce a dense (<10[sup 14] cm[sup -3]), uniform plasma target for atomic collision studies. This plasma, whose cross section is determined by the cathode shape, is rectangular, since it is produced by a...

  • Collisional and radiative processes in high-pressure discharge plasmas. Becker, Kurt H.; Kurunczi, Peter F.; Schoenbach, Karl H. // Physics of Plasmas;May2002, Vol. 9 Issue 5, p2399 

    Discharge plasmas at high pressures (up to and exceeding atmospheric pressure), where single collision conditions no longer prevail, provide a fertile environment for the experimental study of collisions and radiative processes dominated by (i) step-wise processes, i.e., the excitation of an...

  • Bohm criterion failure in nonstationary plasmas. Bliokh, Yu. P.; Felsteiner, J.; Slutsker, Ya. Z.; Vaisberg, P. M. // Physics of Plasmas;Aug2002, Vol. 9 Issue 8, p3311 

    The Bohm criterion, generally used as a boundary condition at the plasma-sheath edge, is not compatible with the time evolution of the voltage fall across the collisionless cathode sheath in a pulsed hollow-cathode discharge. Similarly this criterion is not valid for the interpretation of probe...

  • Spectroscopic study of ionizing and recombining plasma in a stationary plasma source. Namba, S.; Goto, M.; Tsuboi, H.; Oda, T.; Sato, K. // Journal of Applied Physics;9/15/2000, Vol. 88 Issue 6, p3182 

    Reports that a hot cathode, composed of La[sub 2]O[sub 3]-W needles, has been constructed and tested in a modified arc discharge source in order to produce a high-density plasma by large discharge current. Characteristics of generated helium plasmas; Classification of the generated plasmas into...

  • A high-current-density nonclosing plasma cathode. McGeoch, Malcolm W. // Journal of Applied Physics;2/1/1992, Vol. 71 Issue 3, p1163 

    Presents a study that demonstrated a novel plasma cathode. Discharge characteristics; Electron extraction; Discharge uniformity and gas use.

  • Characterization of the interaction between a hollow cathode source and an ambient plasma. Vannaroni, G.; Dobrowolny, M.; Melchioni, E.; De Venuto, F.; Giovi, R. // Journal of Applied Physics;5/15/1992, Vol. 71 Issue 10, p4709 

    Presents information on a study which investigated the laboratory characterization of the interaction between a hollow cathode plasma source and an ambient plasma of ionosopheric type. Description of the experimental setup; Polarizations of the hollow cathode contactor; Anomalous processes...

  • Fused hollow cathode cold atmospheric plasma. Baránková, H.; Bárdos, L. // Applied Physics Letters;1/17/2000, Vol. 76 Issue 3 

    A fused hollow cathode (FHC) plasma source is introduced. The system of radio-frequency (rf) generated hollow cathodes with flowing gas forms an integrated electrode source which operates in the pressure range from 1 Torr to atmospheric pressure. The diameter of the source is 3.5 cm. However,...

  • Existence regions of regimes with anomalously high rates of plasma generation in grid plasma switch elements. Alekseev, N. I.; Kaplan, V. B.; Martsinovskiı, A. M.; Stolyarov, I. I. // Technical Physics;Jun97, Vol. 42 Issue 6, p599 

    Results are presented from a systematic investigation of the conditions under which anomalously high rates of plasma generation are observed in the anode region of a low-voltage Knudsen arc in grid plasma switch elements. The phenomenon develops over a wide range of currents and switched...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics