TITLE

Laser interferometric system for six-axis motion measurement

AUTHOR(S)
Zhang, Zhipeng; Menq, Chia-Hsiang
PUB. DATE
August 2007
SOURCE
Review of Scientific Instruments;Aug2007, Vol. 78 Issue 8, p083107
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This article presents the development of a precision laser interferometric system, which is designed to achieve six-axis motion measurement for real-time applications. By combining the advantage of the interferometer with a retroreflector and that of the interferometer with a plane mirror reflector, the system is capable of simultaneously measuring large transverse motions along and large rotational motions about three orthogonal axes. Based on optical path analysis along with the designed kinematics of the system, a closed form relationship between the six-axis motion parameters of the object being measured and the readings of the six laser interferometers is established. It can be employed as a real-time motion sensor for various six-axis motion control stages. A prototype is implemented and integrated with a six-axis magnetic levitation stage to illustrate its resolution and measurement range.
ACCESSION #
26520502

 

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