Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source

Higashiguchi, Takeshi; Hamada, Masaya; Kubodera, Shoichi
March 2007
Review of Scientific Instruments;Mar2007, Vol. 78 Issue 3, p036106
Academic Journal
A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 μm and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2×1011 W/cm2 with a spot diameter of 175 μm (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.


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