Detection of defects in interconnects by the nonbias-optical beam induced current technique

Koyama, Tohru; Sonoda, Kenichiro
December 1999
Journal of Applied Physics;12/1/1999, Vol. 86 Issue 11, p5949
Academic Journal
Deals with a study which discussed the principles of the nonbias-optical beam induced current technique (NB-OBIC). Experimental procedure of the study; Assumption of the image formation mechanism; Discussion on the result of thermoelectromotive current simulation.


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