TITLE

Precision engineering

AUTHOR(S)
Minghui Hong
PUB. DATE
May 2007
SOURCE
Industrial Laser Solutions;May2007, Vol. 22 Issue 5, p17
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
The article focuses on a few laser nanoprocessing approaches, which are being developed to fabricate smaller, faster, and more functional micro/nanodevices. These include an ND-YAG laser beam which was introduced into a gap between a scanning probe microscopy tip and substrate surface, a laser which was applied to irradiate thin photoresist-coated substrates, and a nanolithography approach. Compared to electron beam processing, laser nanoprocessing is low in cost.
ACCESSION #
25094243

 

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