X-ray photoemission study of CoFeB/MgO thin film bilayers

Read, J. C.; Mather, P. G.; Buhrman, R. A.
March 2007
Applied Physics Letters;3/26/2007, Vol. 90 Issue 13, p503-1
Academic Journal
The authors present results from an x-ray photoemission spectroscopy study of CoFeB/MgO bilayers where they observe process-dependent formation of B, Fe, and Co oxides at the CoFeB/MgO interface due to oxidation of CoFeB during MgO deposition. Vacuum annealing reduces the Co and Fe oxides but further incorporates B into the MgO forming a composite MgBxOy layer. Inserting an Mg layer between CoFeB and MgO introduces an oxygen sink, providing increased control over B content in the barrier.


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