TITLE

X-ray photoelectron spectroscopy of molybdenum-containing carbon films

AUTHOR(S)
Yoon, S. F.; Huang, Q. F.
PUB. DATE
November 1999
SOURCE
Journal of Applied Physics;11/1/1999, Vol. 86 Issue 9, p4871
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents information on a study which reported the results from x-ray photoelectron spectroscopy measurements of molybdenum-containing carbon films deposited using an electron cyclotron resonance chemical vapor deposition system. Experimental procedure; Results and discussion; Conclusions.
ACCESSION #
2472108

 

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