Lasers combined for EUVL light

March 2007
Electronics Weekly;3/7/2007, Issue 2278, p5
Trade Publication
The article reports that the electronics company Powerlase is working with the University of Central Florida in Orlando, Florida to combine two lasers to generate a plasma extreme ultraviolet lithography (EUVL) light source. It is stated that the combined lasers will increase the power output at the target from 10W to 23W.


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