Immersion lithography for 45nm manufacturing

Owa, S.; Hazelton, A.; Magoon, H.
February 2007
Microlithography World;Feb2007, Vol. 16 Issue 1, p4
Trade Publication
The article focuses on the use of immersion lithography in 45 nanometer manufacturing. Immersion lithography should deliver superior imaging performance without negatively impacting yield to ensure its success in high volume manufacturing. It is said that the manufacturing imperfections have made catadioptric lenses more difficult to design. Pollarized illumination is significant in a hyper numerical aperture (NA) lithography.


Related Articles

  • Optical fabrication rises to the 193-mm challenge. Webb, James; Nemechek, John // Laser Focus World;Feb97, Vol. 33 Issue 2, p75 

    Reports that engineers at Tropel Corp. have designed, fabricated, and tested a catadioptric objective for 193-nm lithography. System design parameters; Demanding fabrication and performance requirements; Measure of the performance of the aberrated system compared to theoretical performance.

  • The technical considerations of extending optical lithography. Wagner, Christian; Kaiser, Winfried; Mulkens, Jan; Flagello, Donis G. // Solid State Technology;Sep2000, Vol. 43 Issue 9, p97 

    Considers issues and technology requirements of extending optical lithography for the semiconductor industry. Challenges posed by catadioptric designs with optical lithography; Technology supporting optical extension; Step-and-scan system performance issues in extending optical lithography.

  • A General Framework for the Selection of World Coordinate Systems in Perspective and Catadioptric Imaging Applications. Barreto, João P.; Araujo, Helder // International Journal of Computer Vision;Apr2004, Vol. 57 Issue 1, p23 

    An imaging system with a single effective viewpoint is called a central projection system. The conventional perspective camera is an example of central projection system. A catadioptric realization of omnidirectional vision combines reflective surfaces with lenses. Catadioptric systems with an...

  • Calibration of Central Catadioptric Cameras Using a DLT-Like Approach. Puig, Luis; Bastanlar, Yalin; Sturm, Peter; Guerrero, J. J.; Barreto, João // International Journal of Computer Vision;May2011, Vol. 93 Issue 1, p101 

    In this study, we present a calibration technique that is valid for all single-viewpoint catadioptric cameras. We are able to represent the projection of 3D points on a catadioptric image linearly with a 6×10 projection matrix, which uses lifted coordinates for image and 3D points. This...

  • Immersion Litho R&D Speeds up in Texas.  // Electronic News;7/12/2004, Vol. 50 Issue 28, pN.PAG 

    Provides information on a numeral aperture immersion lithography tool being developed by Austin, Texas-based International Sematech and British exposure tool manufacturer Exitech, as of July 2004. Background on the installation of the tool in an immersion technology center created by Sematech;...

  • Optical design and development of fibre coupled compact solar collectors. Sansoni, P.; Fontani, D.; Francini, F.; Jafrancesco, D.; Longobardi, G. // Lighting Research & Technology;Mar2007, Vol. 39 Issue 1, p17 

    The paper describes the design and realization of optical systems for concentrating solar light onto an optical fibre. Three different classes of optical system, with increasing surface complexity, were studied. These were collectors with spherical surfaces only, parabolic concentrators and...

  • Real-time unwrapping and rectification of high-resolution catadioptric panoramic video during non-stationary moving. Jian Wang; Zhenhai Zhang; Kejie Li; Haiyan Shao; Tao Xu; Shuai Hou; Liang Zhang // Applied Mechanics & Materials;2014, Issue 667-679, p1098 

    Catadioptric panoramic vision system has been widely used in many fields, and also plays a very important role in environment perception of unmanned platform especially. However, the resolution of system is not very high, usually less than 5 million pixels at present. Even if the resolution is...

  • Machine Vision Lighting Demystified. Dechow, David // Quality;May2007, Vol. 46 Issue 5, Special section p10 

    The article focuses on the role of lightning in the success of any machine vision project. Most experts stress that the quality of the image accounts more than 80% to the outcome of any machine vision system design. The main goal in the design of lightning is to create contrast between the...

  • Portable lighting. Luff, John // Broadcast Engineering;Nov2000, Vol. 42 Issue 12, p106 

    Discusses the importance of lighting to digital image processing. Processes used to generate light; Creation of natural images by the visual system; Concept of controlling lighting.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics