TITLE

A novel pretreatment for thin-film measurements

AUTHOR(S)
Danel, Adrien; Tardif, Francois
PUB. DATE
September 1999
SOURCE
Solid State Technology;Sep99 Supplement, Vol. 42 Issue 9, p83
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Provides information on a study which determines the effectivity of Rapid Optical Surface Treatment (ROST) method as a pre-treatment of volatile hydrocarbons for accurate ellipsometry measurement. Volatile hydrocarbon deposition; Hydrocarbon effects; Conventional treatment versus ROST.
ACCESSION #
2392954

 

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