TITLE

Accurate determination of pulsed current waveform in plasma immersion ion implantation processes

AUTHOR(S)
Tian, Xiubo; Tang, Baoyin
PUB. DATE
October 1999
SOURCE
Journal of Applied Physics;10/1/1999, Vol. 86 Issue 7, p3567
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study which measured the ion current waveform in plasma immersion ion implantation (PIII). Potential application of PIII; Theoretical simulation; Results of the study.
ACCESSION #
2346201

 

Related Articles

  • Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively... Sobolewski, Mark A.; Olthoff, James K. // Journal of Applied Physics;4/15/1999 Part 1 of 2, Vol. 85 Issue 8, p3966 

    Presents information on a study which measured ion energy distributions and ground sheath voltage in an inductively coupled, high-density plasma reactor. Experimental apparatus and methods; Results and discussion.

  • Determination of electron density and temperature in non-LTE plasmas from spectral lines of impurity ions. Kunc, Joseph A. // Journal of Applied Physics;2/1/1988, Vol. 63 Issue 3, p656 

    Focuses on a study that presented an approach to determine the population of the excited lithiumlike ions in stationary nonequilibrium plasmas. Methodology; Discussion of rate coefficients; Results and discussion.

  • Poloidal ion motion during formation of toroidal high beta plasmas. Antoniades, J. A.; Goldenbaum, G. C.; Weber, B. V. // Physics of Fluids (00319171);May88, Vol. 31 Issue 5, p1244 

    Spectroscopic measurements of the ion motion in a fast compression high beta tokamak experiment show paramagnetic ion motion. This motion is initially caused by magnetic field gradient drift, which does not produce any net paramagnetic current opposing the plasma diamagnetic current. After the...

  • Resonant coupling between ion bounce in a potential well and the potential relaxation instability. Popa, G.; Schrittwieser, R. // Physics of Plasmas;Jan1994, Vol. 1 Issue 1, p32 

    Examines the resonant coupling between ion bounce in a potential well and the potential relaxation instability. Factors attributed to the formation of low-density plasma; Formation of a positive space-charge behind the grid in the target chamber; Potential relaxation oscillation.

  • Ion ring propagation in a magnetized plasma. Schamiloglu, E.; Greenly, J. B.; Hammer, D. A. // Physics of Fluids B: Plasma Physics;Aug93, Vol. 5 Issue 8, p3069 

    The propagation of an ion ring in a 2.5 m long, 0.30 m diam magnetized plasma column was studied using an axial array of magnetic probes and fast proton detectors, a microwave interferometer, and a grating spectrometer. The ring propagated with an initial axial velocity 3×106 m/sec, about...

  • Kink stability of a field-reversed ion layer in a background plasma. Ishida, A.; Sudan, R. N.; Rosenbluth, M. N.; Engquist, M. G. // Physics of Fluids (00319171);Aug86, Vol. 29 Issue 8, p2580 

    By means of the two-fluid energy principle, the kink stability boundary of a field-reversed ion layer of arbitrary thickness immersed in a dense low-temperature background plasma is investigated theoretically. This system is found to have a stability window against kinks. The dependence of the...

  • Optimizing hot-ion production from a gas-injected washer gun. McCarrick, M. J.; Ellis, R. F.; Booske, J. H.; Koepke, M. // Journal of Applied Physics;3/1/1987, Vol. 61 Issue 5, p1747 

    Presents information on a study which investigated the maximization of the ion temperature of the plasma generated by a gas-injected washer gun. Experimental setup; Summary of relevant diagnostics; Experimental results.

  • Optical confinement of low-temperature plasma with resonant ions. Gavrilyuk, A. P.; Krasnov, I. V.; Shaparev, N. Ya. // JETP Letters;3/10/96, Vol. 63 Issue 5, p324 

    Applications of the rectification of a gradient force in interfering bichromatic fields produced by intersecting laser beams for selective optical confinement of low-temperature electron-ion plasma with resonant ions are examined. © 1996 American Institute of Physics.

  • Effect of trapped ions on shielding of a charged dust grain in a plasma. Tskhakaya, D. D.; Shukla, P. K.; Stenflo, L. // Physics of Plasmas;Dec2001, Vol. 8 Issue 12, p5333 

    The trapped ion effects on the shielding of a charged dust grain in a plasma are examined. It is shown that ions with low angular momentum cannot form a trapped cloud in a potential well. Therefore, it is necessary to examine the possibility of producing trapped ion clouds with large angular...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics