Accurate determination of pulsed current waveform in plasma immersion ion implantation processes

Tian, Xiubo; Tang, Baoyin
October 1999
Journal of Applied Physics;10/1/1999, Vol. 86 Issue 7, p3567
Academic Journal
Presents a study which measured the ion current waveform in plasma immersion ion implantation (PIII). Potential application of PIII; Theoretical simulation; Results of the study.


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