TITLE

Microlithography for on-chip high-Q inductors

AUTHOR(S)
Soussan, P.; Carchon, G.; Swinnen, B.; Beyne, E.
PUB. DATE
November 2006
SOURCE
Microlithography World;Nov2006, Vol. 15 Issue 4, p10
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article discusses the integration of on-chip passive electronic components called high quality factor inductors into advanced water-level packaging microlithography, patterned using proximity mask aligners. Photosensitive benzocyclobutene 4026 forms the dielectric isolation and semi-additive copper plating is used to make the conductors.
ACCESSION #
23251687

 

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