Modified free vibrating beam method for characterization of effective e31 coefficient and leakage resistance of piezoelectric thin films

Defaÿ, Emmanuel; Zinck, Christophe; Malhaire, Christophe; Baboux, Nicolas; Barbier, Daniel
October 2006
Review of Scientific Instruments;Oct2006, Vol. 77 Issue 10, p103903
Academic Journal
A modified free vibrating beam method has been developed in order to characterize the effective e31 piezoelectric transversal coefficient and the leakage resistance of piezoelectric thin films deposited onto a silicon beam. The main advantage of this method is that it requires no extra electrical measurements. Experiment was realized on lead zirconate titanate thin films.


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