TITLE

The expanding role of excimer lasers: THE UNIQUE MATERIALS PROCESSING CAPABILITIES OF EXCIMER LASERS HAVE CREATED AN EVER-WIDENING RANGE OF APPLICATIONS

AUTHOR(S)
Hack, Ruediger; Philpott, Matthew; Sercel, Jeff
PUB. DATE
October 2006
SOURCE
Industrial Laser Solutions;Oct2006, Vol. 21 Issue 10, p10
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
The article presents a discussion of the uses and applications of excimer lasers. Excimer lasers have unique materials processing capabilities which gave these lasers a wide range of applications in different fields like in LASIK eye surgery, flat panel display annealing, and semiconductor microlithography.
ACCESSION #
22940200

 

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