TITLE

New long trace profiler based on phase plate diffraction for optical metrology of SSRF

AUTHOR(S)
Zeng, Danhua; Xiao, Tiqiao; Du, Guohao; Wen, Li; Luo, Hongxin; Xia, Shaojian; Xu, Hongjie
PUB. DATE
September 2006
SOURCE
Review of Scientific Instruments;Sep2006, Vol. 77 Issue 9, p093305
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A long trace profiler LTP-1200, with a novel f-θ system based on phase plate diffraction and a scanning range up to 1200 mm, has been developed at Shanghai Synchrotron Radiation Facility. The central dark line in the diffraction pattern generated by a π phase plate is taken as the positioning benchmark. A magnet levitated linear rail with very high accuracy is used. A granite bench is employed to reduce deformation due to self-gravity of the rail. The focused diffraction pattern is recorded with an area charge-coupled device. The generalized regression neural network algorithm is adopted to improve the beam positioning precision. The static stability of LTP-1200 in 5 h is 0.14 μrad, and the repeatability reaches 0.05 μrad in a common laboratory without any special control of temperature, air turbulence, etc. Calibration tests were carried out with a high precision autocollimator and a standard spherical mirror, respectively. Results show the high performance and reliability of the LTP-1200.
ACCESSION #
22578501

 

Related Articles

  • Z-shaped wire profile and position monitor for collimated synchrotron radiation using a single linear motion. Kanazawa, K. // Review of Scientific Instruments;Nov86, Vol. 57 Issue 11, p2891 

    A simple position and profile monitor for collimated synchrotron radiation (SR) using only one linear motion feedthrough was constructed and successfully employed to align the SR beam line of the TRISTAN accumulation ring.

  • Ideal collimation, concentration, and imaging with curved diffractive optical elements. Bokor, Nándor; Davidson, Nir // Review of Scientific Instruments;Nov2005, Vol. 76 Issue 11, p111101 

    In this article the design, optimization and characterization of diffractive optical elements formed on a curved surface are reviewed. For such curved diffractive optical elements not only the phase function, but also the surface shape are free parameters that can be used for optimization,...

  • Surface diffraction beamline at ESRF. Ferrer, S.; Comin, F. // Review of Scientific Instruments;Feb1995, Vol. 66 Issue 2, p1674 

    Describes the main components of the surface diffraction beamline at the European Synchrotron Radiation Facility in Grenoble, France. Beamline design; Diffractometer; Vacuum systems; Preliminary results from the beamline.

  • Thermal bilayer monochromator crystal for a high resolution multiwavelength anomalous diffraction... Ferrer, Jean-Luc; Roth, Michael; Fanchon, Eric; Poupon, Gilles; Saint-Lager, Marie-Claire; Berar, J.-F. // Review of Scientific Instruments;Feb1995, Vol. 66 Issue 2, p2089 

    Describes a thermal bilayer monochromator crystal for a high resolution multiwavelength anomalous diffraction beamline at the European Synchrotron Radiation Facility in Grenoble, France. Theoretical aspects of the monochromator crystal; Manufacture of the bilayer; Manufacture of the cooling...

  • Development of a microarea diffraction system by polychromatic synchrotron radiation with the... Ohsumi, Kazumasa; Hagiya, Kenji; Uchida, Masaya; Suda, Noboru; Miyamoto, Masamichi; Kitamura, Masao; Ohmasa, Masaaki // Review of Scientific Instruments;Feb1995, Vol. 66 Issue 2, p1448 

    Describes the development of microarea diffraction equipment with a micropinhole and an imaging plate using the Laue method combined with polychromatic synchrotron radiation. Production of the microbeam at the sample position; Evaluation of the diffraction data obtained using the micropinhole.

  • Kratky block-collimation small-angle x-ray diffractometer for synchrotron radiation. Chu, Benjamin; Wu, D.-Q.; Wu, C. // Review of Scientific Instruments;Jul1987, Vol. 58 Issue 7, p1158 

    A block slit collimation system of the Kratky design concept has been modified and adapted for synchrotron radiation. The building block small-angle x-ray diffractometer (SAXD) not only retains the essential advantages of the Kratky camera, i.e., accessibility at small values of...

  • A refractive collimator for synchrotron radiation. Baron, A.Q.R.; Kohmura, Y. // Applied Physics Letters;3/8/1999, Vol. 74 Issue 10, p1492 

    Studies the use of a plastic refractive lens to collimate synchrotron radiation. Reduction of the divergence of a radiation beam from an undulator; Incident radiation from a distant point source; Principle behind a refractive collimator.

  • Coherent addition of AlGaAs lasers using microlenses and diffractive coupling. Leger, James R.; Scott, Miles L.; Veldkamp, Wilfrid B. // Applied Physics Letters;5/23/1988, Vol. 52 Issue 21, p1771 

    A near single-lobed far-field pattern was obtained from coherent operation of a nonevanescently coupled AlGaAs laser diode array. A diffractive microlens array collimated the individual beams to approximate a plane wave, and diffractive coupling from an external cavity mirror provided mutual...

  • Upgrade of triple-axis/four-circle diffractometer at PF-BL3A. Takagi, Yasuo; Kikuchi, Toshiharu; Mizutani, Toshiyuki; Imafuku, Muneyuki; Sasaki, Satoshi; Mori, Takeharu // Review of Scientific Instruments;Feb1995, Vol. 66 Issue 2, p1802 

    Describes the installation of goniometers on the triple-axis/four-circle diffractometer SIN-1 at the PF-BL3A synchrotron radiation beamline at Photon Factory in Tsukuba, Japan, to improve data acquisition ability and beam collimation. X-ray optics; Goniometer design; Installation of linear...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics