New long trace profiler based on phase plate diffraction for optical metrology of SSRF

Zeng, Danhua; Xiao, Tiqiao; Du, Guohao; Wen, Li; Luo, Hongxin; Xia, Shaojian; Xu, Hongjie
September 2006
Review of Scientific Instruments;Sep2006, Vol. 77 Issue 9, p093305
Academic Journal
A long trace profiler LTP-1200, with a novel f-θ system based on phase plate diffraction and a scanning range up to 1200 mm, has been developed at Shanghai Synchrotron Radiation Facility. The central dark line in the diffraction pattern generated by a π phase plate is taken as the positioning benchmark. A magnet levitated linear rail with very high accuracy is used. A granite bench is employed to reduce deformation due to self-gravity of the rail. The focused diffraction pattern is recorded with an area charge-coupled device. The generalized regression neural network algorithm is adopted to improve the beam positioning precision. The static stability of LTP-1200 in 5 h is 0.14 μrad, and the repeatability reaches 0.05 μrad in a common laboratory without any special control of temperature, air turbulence, etc. Calibration tests were carried out with a high precision autocollimator and a standard spherical mirror, respectively. Results show the high performance and reliability of the LTP-1200.


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