The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider

Chao, Shih-Hui; Garbini, Joseph L.; Dougherty, William M.; Sidles, John A.
June 2006
Review of Scientific Instruments;Jun2006, Vol. 77 Issue 6, p063710
Academic Journal
Inertial sliders are often used to produce coarse relative positioning for scanning probe microscopes. This article describes the design, dynamic analysis, and control of a compact four-segment piezoceramic tube scanner employing an inertial slider. Velocity feedback control, implemented using two-segment piezoelectric sensing, was used to suppress undesired vibrations in the tube, and to improve scanner step uniformity. The control analysis was based on an empirical open-loop identification of the as-built tube behavior, which was also measured using the two-segment sensing technique. A reset integrator friction simulation predicted the overall system performance, and showed good agreement with experimental results.


Related Articles

  • Methods and instrumentation for piezoelectric motors. Drevniok, B.; Paul, W. M. P.; Hairsine, K. R.; McLean, A. B. // Review of Scientific Instruments;Mar2012, Vol. 83 Issue 3, p033706 

    Because of their compact form factor and rigidity, piezoelectric motors are used in scanning probe microscopes that operate at low temperature and high magnetic field. Here we present detailed information to facilitate the assembly, operation, and characterization of inertial motors....

  • Easy method to characterize a piezoelectric ceramic tube as a displacer. Locatelli, M.; Lamboley, G.; Michenaud, J. P.; Bayot, V. // Review of Scientific Instruments;Apr88, Vol. 59 Issue 4, p661 

    We describe a useful method using a commercial linear variable differential transformer as a detector to characterize a piezoelectric ceramic tube as a displacer. Results show some inhomogeneity in the reduction of the voltage-to-displacement conversion of commercial piezoelectric tubes as a...

  • Simple retrofittable long-range x-y translation system for scanned probe microscopes. Smith, W.F.; Abraham, M.C.; Sloan, J.M.; Switkes, M. // Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3599 

    Describes a simple retrofittable system for long-range translation of scanned probe microscopy (SMP) samples. Overview of the design; Design configurations; Construction details.

  • A nanopositioner for scanning probe microscopy: The KoalaDrive. Cherepanov, Vasily; Coenen, Peter; Voigtländer, Bert // Review of Scientific Instruments;Feb2012, Vol. 83 Issue 2, p023703 

    We present a new type of piezoelectric nanopositioner called KoalaDrive which can have a diameter less than 2.5 mm and a length smaller than 10 mm. The new operating principle provides a smooth travel sequence and avoids shaking which is intrinsic to nanopositioners based on inertial motion with...

  • A versatile stable scanning proximal probe microscope. Jahncke, C.L.; Hallen, H.D. // Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1759 

    Presents a novel scanning proximal probe microscope design utilizing a piezoelectric driven coarse positioning mechanism in x, y and z while maintaining relatively small lateral dimensions. Design and principle of operation of the instrument; Coarse positioning; Mechanism used for generating...

  • The flexible and modern open source scanning probe microscopy software package GXSM. Zahl, Percy; Bierkandt, Markus; Schröder, Stefan; Klust, Andreas // Review of Scientific Instruments;Mar2003, Vol. 74 Issue 3, p1222 

    GXSM is a full featured and modem scanning probe microscopy (SPM) software. It can be used both in stand alone mode for powerful image processing and analysis and connected to an instrument operating many different flavors of SPM, e.g., scanning tunneling microscopy and atomic force microscopy...

  • Scanning surface harmonic microscopy: Scanning probe microscopy based on microwave field-induced harmonic generation. Michel, B.; Mizutani, W.; Schierle, R.; Jarosch, A.; Knop, W.; Benedickter, H.; Bächtold, W.; Rohrer, H. // Review of Scientific Instruments;Sep92, Vol. 63 Issue 9, p4080 

    A scanning probe microscope has been integrated into a microwave resonator tunable from 2.2 to 3.4 GHz with a quality factor Q larger than 1000. Nonlinear phenomena caused generation of higher harmonics when rf fields in the range of 109 V/m were applied between tip and sample. Higher harmonic...

  • Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed. Kenton, Brian J.; Fleming, Andrew J.; Leang, Kam K. // Review of Scientific Instruments;Dec2011, Vol. 82 Issue 12, p123703 

    The mechanical design of a high-bandwidth, short-range vertical positioning stage is described for integration with a commercial scanning probe microscope (SPM) for dual-stage actuation to significantly improve scanning performance. The vertical motion of the sample platform is driven by a stiff...

  • Vertical ramp-actuated inertial micropositioner with a rolling-balls guide. Yakimov, V.N. // Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p136 

    Describes the development and testing of a vertical inertial micropositioner for scanning probe microscopy. Use of a rolling-balls guide for translation of a slider; Resonance frequencies; Design of the micropositioner; Operation.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics