TITLE

Matsushita Uses Mentor DFM Tools to Measure Process Variability

AUTHOR(S)
Mutschler, Ann Steffora
PUB. DATE
September 2006
SOURCE
Electronic News;9/25/2006, Vol. 52 Issue 39, p34
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article reports on the use of Mentor Graphics' Calibre OPCverify design-for-manufacturing (DFM) software by Matsushita Electric Industrial Co. Ltd. for use in production at 65nm and below to examine the impact of process variability on yield by finding and fixing potentially catastrophic yield issues before manufacturing. Mentor says its Calibre OPCverify detects lithographic errors or marginalities caused by process variability before the design goes to the mask or wafer manufacturer.
ACCESSION #
22563158

 

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