TITLE

Diffusion and resolution

AUTHOR(S)
Mack, Chris A.
PUB. DATE
May 2006
SOURCE
Microlithography World;May2006, Vol. 15 Issue 2, p14
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Explains the impact of diffusion on resolution in lithography. Background on Fickean diffusion; Effect of reducing the latent image slope; Comparison of the sensitivity of a dense feature to diffusion with that of an isolated feature.
ACCESSION #
21068794

 

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