TITLE

Litho-friendly design: A necessary complement to RET

AUTHOR(S)
Torres, J. Andres
PUB. DATE
May 2006
SOURCE
Microlithography World;May2006, Vol. 15 Issue 2, p10
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Discusses the importance of lithography-friendly design to the use of resolution enhancement techniques in the manufacture of advanced integrated circuits (IC). Steps in the procedure of prioritizing weak regions in an IC layout; Benefit of having layouts with sensitivity to lithography induced variations; Abilities of lithographers.
ACCESSION #
21068793

 

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