Litho-friendly design: A necessary complement to RET

Torres, J. Andres
May 2006
Microlithography World;May2006, Vol. 15 Issue 2, p10
Trade Publication
Discusses the importance of lithography-friendly design to the use of resolution enhancement techniques in the manufacture of advanced integrated circuits (IC). Steps in the procedure of prioritizing weak regions in an IC layout; Benefit of having layouts with sensitivity to lithography induced variations; Abilities of lithographers.


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